| X/Y-Axis Travel: | 600X500mm |
|---|---|
| Z-Axis Travel: | 200mm |
| X/Y/Z3-Axis Linear Scale(2.5D): | European Linear Scale Resolution: 0.1um |
| Guidance Mode: | Precision Linear Guide, Double-Track Double Slider |
| Repeatability: | ±2um |
| Software System: | 2.5D Imeasuring 3.0 Fully-Auto Measuring Software |
| Customization: |
|---|
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