| X/Y-Axis Travel: | 400X300mm |
|---|---|
| Z-Axis Travel: | 200mm |
| X/Y/Z 3-Axis Linear Scale: | High Precision Linear Scale,Resolution:0.0001mm |
| Operation Mode: | Joystick Controller, Mouse Operation, Automatic De |
| Measurement Accuracy: | Xy-Axis:<=2+L/200(Um); Z-Axis:&<=5+L/200(Um) |
| Repeatability: | +-2um |
| Customization: |
|---|
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