X/Y-Axis Travel: | 400X300mm |
---|---|
Z-Axis Travel: | 200mm |
X/Y/Z 3-Axis Linear Scale: | High Precision Linear Scale,Resolution:0.0001mm |
Operation Mode: | Joystick Controller, Mouse Operation, Automatic De |
Measurement Accuracy: | Xy-Axis:<=2+L/200(Um); Z-Axis:&<=5+L/200(Um) |
Repeatability: | +-2um |
Customization: |
---|