| Customization: | Available |
|---|---|
| Warranty: | 12 Months |
| Substrate Flatness: | <10u |
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| (1) | Substrate size | 500mm*500mm |
| (2) | Substrate flatness | <10u |
| (3) | Substrate wettability | <15° |
| (4) | Substrate temperature | 23±2ºC |
| (1) | type | Isopropanol, DMF, DMSO and other organic solvents or other mixed solvents |
| (2) | viscosity | 1~70CPS |
| (3) | Solids content | 7%~50% |
| (1) | Film-forming method | Slot coating |
| (2) | viscosity | 300nm~10um(Dry film) |
| (3) | Film-forming homogeneity | 5% ≤ in-film, 5% ≤ between films |
| Number | Project | Technical parameters | Remark |
| 1 | Material | SUS630 | |
| 2 | Coated width | 450mm | |
| 3 | Flatness/straightness | ≤3um | |
| 4 | Lumen roughness | Ra≤0.025 | |
| 5 | Slit gaps | Gasket type, gasket thickness uniformity ≤±2um | |
| 6 | Gap adjustment range | ≤±10um | |
| 7 | Except for the edge range | ≤10mm | |
| 8 | Coating head anti-collision assembly | It is 20um lower than the lip, which effectively prevents the lip from colliding | |
| 9 | Coating head correction | It is automatically corrected by a high-precision linear displacement sensor | |
| 10 | Bubble drain design | The die chamber is high-level and has a high level of vesicle holes |
| Number | Project | Technical parameters | Remark |
| 1 | Pump body material | SUS316L | |
| 2 | Sealing ring material | Corrosion-resistant seals | |
| 3 | Pump volume | 5ml | |
| 4 | Drive control | Servo motor, ball screw | |
| 5 | Spit control resolution | 0.01ul/s | |
| 6 | Response time | 0.01s | |
| 7 | Spit velocity | 0~2000ul/s | |
| 8 | Maximum spit acceleration | 2000ul/s² | |
| 9 | Functional configuration | 1)The liquid supply pump automatically relieves the pressure after replenishment; 2)Liquid discharge delay function; 3)Terminal suck-back function; 4)Automatic rehydration function; 5)Multi-stage coating adjustment; |
| Number | Project | Technical parameters |
| 1 | Number of Z-axes | 2 |
| 2 | Z-axis resolution | 0.1um |
| 3 | Z-axis drive control | Servo motor, grinding grade screw, guide rail |
| 4 | Z-axis repeatability | ≤5um |
| 5 | Z-axis velocity range | 0~50mm/s |
| 6 | Y-axis drive type | Platform-driven |
| 7 | Y-axis drive control | Servo motor, grinding grade screw, guide rail |
| 8 | Y-axis speed range | 0~200mm/s |
| 9 | Y-axis motion surface accuracy | Better than ±5um |
| 10 | Y-axis repeatability | ≤5um |
| 11 | Functional configuration | 1)Coating acceleration and deceleration can be set and adjusted; 2)Coating Gap adjustable; 3) Adjustable Gap of end retraction; |
| Number | Project | Technical parameters | Remark |
| 1 | Material | 000 grade granite | |
| 2 | Adapts to the substrate size | 500*500mm | |
| 3 | Surface flatness | Levelness≤±5um | |
| 4 | Substrate positioning | Platform vacuum adsorption | |
| 5 | Substrate alignment | Manual | |
| 6 | Pick and place the tablet | Manual |
| Number | Project | Technical parameters | Remark |
| 1 | Tubing material | PFA | |
| 2 | Liquid supply tank | Peeled material, 100ml volume | |
| 3 | Liquid supply method | The tank is pressurized | |
| 4 | Wash the tank | Made of stainless steel |
| Number | Project | Technical parameters | Remark |
| 1 | Pre-coating method | Pre-coating platform | |
| 2 | Die lip cleaning | Manual | |
| 3 | Soak and drain the tank | It is used when the equipment is idle, the pipeline is clean, and the waste is discharged |
| Number | Project | Technical parameters | Remark |
| 1 | touch screen | Pre-coating platform | |
| 2 | Log recording function | The coating process of each substrate can be viewed, including the speed and position parameters of each axis of the coater at each time point in the coating process | |
| 3 | Operational permissions | Three types of operation permissions to log in. Manual, semi-automatic, and automatic actions of the device can all be operated on the interface |
| Number | Project | Technical parameters | Remark |
| 1 | compose | Alloy, Punch Plate, FFU, Sealing Strip | |
| 2 | devise | Transparent can observe the coating condition in real time. FFU purging micro positive pressure ensures that the external environment is better than that of class 1,000 in the external environment | |
| 3 | exhaust | The outer cover is reserved with organic exhaust ports, and the interface size is DN80 |
| 1 | Emergency switch | The clean cover, operation interface, electric control box and other positions are equipped with EMO switches, and multiple points can be quickly stopped in case of emergency |
| 2 | Safety interlocks | The source of machine hazards uses a fail-safe hardware interlocking device , which stops the work of units that may cause injuries when the protective cover of the equipment is opened. |
| 3 | Sound and light alarm | The equipment is installed with an audible and visual alarm device in a conspicuous or customer-specified position |
| 4 | Clean cover | The equipment is isolated by an outer cover, and the dust cover is kept away from the external environment while preventing personnel from entering during operation |
| 5 | Ventilation and exhaust | The coating of organic volatile gases is designed with an exhaust connection |
| 6 | other | The design of the equipment for the use of water, electricity, and chemicals meets national safety standards |
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