3D Auto Optical Inspection System for Semiconductor Manufacturing

• Customization: Available
• Magnification: 100-500X
• Type: Video
• Model NO.: MVA-3020P
• Mobility: Desktop
• Stereoscopic Effect: Without Stereoscopic Effect
• Kind of Light Source: Laser
• Shape: Rectangular Prism
• Usage: Teaching, Research
• Principle: Electronic
• Principle of Optics: Polarizing Microscope
• Transport Package: Plywood
• Specification: CE, ISO
• Trademark: SINOWON
• Origin: Dongguan, China
• HS Code: 90314910
• Production Capacity: 20 Sets/Month

Product Description

3D Fully Auto Vision Measuring Machine MVA Series

Product Introduction:

3D MVA is a classical Fully Auto Vision Measuring Machine, it is equipped with four-axis motorized control and auto zoom lens and probe, powerful function, simple operation, widely application.



Product Characteristics:

1. Four-axis CNC fully auto close loop control, auto measurement;
2. "00" grade "JINANQING"marble base and pillar, stable and reliable;
3. Precision linear guide, grinding ball screw and AC servo motor, ensure accuracy stability of system  position;
4. High precision linear scale, resolution is 0.5um, high accuracy, great stability;
5. Imported high definition color industry digital camera, ensure clear observation and stable measurement requirement;
6. 6.5X continue auto zoom lens, precision auto zoom, only need to make pixel calibration once time;
7. Programmable 5-ring 8-division LED surface illumination, contour parallel LED illumination, can realize 256 grade brightness adjustment intelligently;
8. With proprietary powerful function fully auto measuring software iMeasuring 4.2;

Technical Specification:

Product Name		3D Fully Auto Vision Measuring Machine
Model		MVA-3020P
Code#		524-360
X/Y-axis Travel(mm)		300x200
Z-axis Travel(mm)		200
X/Y/Z 3-axis  Linear Scale(mm)		High precision linear scale,resolution:0.0005mm
Guidance Mode		Precision linear guide,double-track double slider guide
Operation Mode		Joystick controller, Mouse operation, automatic detection program
Measurement Accuracy		XY-axis:≤3+L/200
		Z-axis:≤5+L/200
Repeatability		±2um
Video System		High definition 1/3" Color CCD Camera,
		6.5X continue click zoom lens; optical magnification: 0.7X-4.5X; video magnification:126X~172X(21.5"monitor)
Field of View(mm) (Diagonal * Horizontal*Vertical)	Lens Magnification	0.7x	1x	2.0x	3.0x		4x	4.5x
	1/3"CCD	8.57x6.86x5.14	6.00x4.80x3.60	3.00x2.40x1.80	2.00x1.60x1.20		1.50x1.20x0.90	1.33x1.07x0.80
Illumination	Contour	LED Parallel Contour Illumination
	Surface	5-ring 8-division 0~255 grade continue adjustable
Software System		iMeasuring 4.2 Fully Auto Measuring Software
Load Capacity (Kg)		25
Working Environment		Temperature 20ºC±2ºC,Humidity Range<2ºC/hr,Humidity 30~80%,Vibration<0.002g,<15Hz
Power		220V/50Hz/10A
Dimension(mm)		1200x780x1650
Packing Dimension(mm)		1360x1030x1900
Weight(Kg)		380

* L is measuring length,unit is mm, the mechanical accuracy of Z-axis and focus accuracy is greatly related to the surface of the workpiece.
* * Magnification is approximate value, it is related to the dimension of monitor and resolution.
Customers can choose 0.5X or 2X optional objective, and realize image magnification: 13X~86X or 52X~344X.


Applicaiton:

Semiconductor Manufacturing: Wafers, front-ends, back-ends, and components

Precision Metal Processing: Machining, Stamping, Powder Metallurgy Injection Molding

Precision plastic

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