Auto Laser Scan Video Measuring System for Wafers

• Magnification: 100-500X
• Type: Video
• Number of Cylinder: Binoculars
• Mobility: Desktop
• Stereoscopic Effect: Without Stereoscopic Effect
• Kind of Light Source: Laser
• Model NO.: AutoScan-652
• Shape: Rectangular Prism
• Usage: Teaching, Research
• Principle: Electronic
• Principle of Optics: Polarizing Microscope
• Transport Package: Plywood
• Specification: CE, ISO
• Trademark: SINOWON
• Origin: Dongguan, China
• HS Code: 90318020
• Production Capacity: 20 Sets/Month

Product Description

AutoScan 652 Auto Laser Scan Vision Measuring Machine

 

Production Introduction:
AutoScan is equipped with non-contact laser sensor to realize 3D measurement. It is widely used in non-contact measurement, and able to realize thickness, flatness and scan measurement.



Key words: 
Repeatability: ±2um
Resolution: 0.0001mm
X/Y-axis Travel(mm): 600x500mm
Z-axis Travel(mm): 200mm

Technical Specification:

Product Name		Auto Laser Scan Vision Measuring Machine
Model		AutoScan 652
Code#		522-141
X/Y-axis Travel(mm)		600x500mm
Z-axis Travel(mm)		200mm
X/Y/Z 3-axis  Linear Scale(mm)		High precision linear scale,resolution:0.0001mm
Guidance Mode		Precision linear guide,double-track double slider guide
Operation Mode		Joystick controller, Mouse operation, automatic detection program
Measurement Accuracy		XY-axis:≤2+L/200(um)
		Z-axis:≤5+L/200(um)
Repeatability		±2um
Video System		1/3" Color CCD Camera
		6.5X auto zoom lens
		6.5X auto zoom lens; optical magnification: 0.7X-4.5X; video magnification:20X~129X(21.5"monitor)
Field of View(mm) (Diagonal *Horizontal*Vertical)	Lens Magnification	0.7x	1x		2.0x	3.0x		4x		4.5x
	1/2"CCD	11.43x9.14x6.86	8.00x6.40x4.80		4.00x3.20x2.40	2.67x2.13x1.60		2.00x1.60x1.20		1.78x1.42x1.07
Illumination	Contour	LED Parallel Contour Illumination
	Surface	5-ring 8-division 0~255 grade continue adjustable
Software System		iMeasuring 5.0 Fully Auto Measuring Software
Load Capacity		30kg
Working Environment		Temperature 20ºC±2ºC,Humidity Range<2ºC/hr,Humidity 30~80%,Vibration<0.002g,<15Hz
Power		220V/50Hz/10A
Dimension		1600x1050x1650mm
Packing Dimension		1800x1400x2000mm
Weight(Kg)		1380Kg

* L is measuring length,unit is mm, the mechanical accuracy of Z-axis and focus accuracy is greatly related to the surface of the workpiece.
* * Magnification is approximate value, it is related to the dimension of monitor and resolution.
Customers can choose 0.5X or 2X optional objective, and realize image magnification: 10X~64.5X or 40X~258X.

Application:

Semiconductor Manufacturing: Wafers, front-ends, back-ends, and components

Precision Metal Processing: Machining, Stamping, Powder Metallurgy Injection Molding

Precision plastic


Product Characteristics:

• Imported P grade linear guide,, precision grinding ball screw and AC servo motor, ensure accuracy stability of system position;
• Imported high definition color industry camera, ensure clear observation and stable measurement requirement;
• 6.5X continue auto zoom lens, precision auto zoom, only need to make pixel calibration once time;
• Programmable 5-ring 8-division LED surface illumination, contour parallel LED illumination, can realize 256 grade brightness adjustment intelligently.